报告人: Professor MengChu Zhou (New Jersey Institute of Technology)
报告题目:A Petri Net-based Approach to Modeling, Scheduling and Control of Cluster Tools in Semiconductor Manufacturing
报告时间： 8月14日下午 2：00
摘要： Cluster tools provide a flexible, reconfigurable, and efficient environment for semiconductor manufacturing. They become difficult to operate because of residency time constraints and process time variation. This talk addresses their modeling, scheduling and control issues. A generic Petri net model is developed to model them. It describes the robot activity sequence with robot waits included. Hence, to operate a cluster tool is to determine robot wait times. A two-level operational architecture is proposed and discussed. It includes an off-line periodic scheduler and real-time controller. This proposed approach allows a cluster tool to adapt to activity time variation while operate at its highest throughput at the steady-state. The Petri net models play a critical role in ensuring proper transient processes and optimal steady-state operations of cluster tools.
报告人简介： MengChu Zhou is a Professor of Electrical and Computer Engineering and the Director of Discrete-Event Systems Laboratory at New Jersey Institute of Technology. His research interests are in Petri nets, semiconductor manufacturing, sensor networks and life-cycle engineering product design. He is Editor of IEEE Transactions on Automation Science and Engineering, Associate Editor of IEEE Transactions on Systems, Man and Cybernetics: Part A and IEEE Transactions on Industrial Informatics
Dr. Zhou was the recipient of NSF’s Research Initiation Award, CIM University-LEAD Award by Society of Manufacturing Engineers, Perlis Research Award by NJIT, Humboldt Research Award for US Senior Scientists, Leadership Award and Academic Achievement Award by Chinese Association for Science and Technology-USA, Outstanding Contribution Award and Distinguished Lecturer of IEEE SMC Society, and Chang Jiang Visiting Scholars Program Award from PRC Ministry of Education. He is Fellow of IEEE.